Electronic Ultrapure Water
Current position: Home / Technical Capability / Environmental Engineering / Electronic Ultrapure Water

UPW-HiDB ultrapure water polishing boron removal system

Application objects: ultrapure water treatment system with extremely high boron requirements in the integrated circuit and silicon wafer industry

Key technologies: Boron removing resin, polishing resin, boron removing anion bed

Technical advantages:

1)The boron selection resin contains polyhydroxy functional groups and is highly selective to boric acid;

2)The design of stratified bed and the rear-mounted TOC-UV solves the problem of TOC dissolution from boron removal resin;

3)Concentration of produced water B<10 ppt, TOC<2 ppb.